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Plasma-Surface Interaction Data Set 169

Sputtering of Ne⁺ on Be(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Ne⁺ on Be(pc) at 300 K

angle = 0.0 deg	E /eV	P
	22.77	0.0
	27.03	4.308e-05
	32.07	0.000233
	38.06	0.0007236
	45.17	0.001793
	53.6	0.003924
	63.6	0.007925
	75.48	0.01509
	89.57	0.02733
	106.3	0.04724
	126.1	0.07766
	149.7	0.1208
	177.6	0.1765
	210.8	0.2417
	250.1	0.3104
	296.8	0.3767
	352.3	0.4362
	418.0	0.4875
	496.1	0.5307
	588.7	0.567
	698.6	0.5977
	829.0	0.6239
	983.8	0.6463
	1167.0	0.6654
	1385.0	0.6814
	1644.0	0.6944
	1951.0	0.7045
	2315.0	0.7114
	2747.0	0.7151
	3260.0	0.7154
	3869.0	0.7122
	4591.0	0.7054
	5448.0	0.695
	6465.0	0.6811
	7672.0	0.6637
	9105.0	0.643
	10800.0	0.6194
	12820.0	0.5931
	15220.0	0.5647
	18060.0	0.5345
	21430.0	0.5031
	25430.0	0.4709
	30170.0	0.4384
	35810.0	0.406
	42490.0	0.3742
	50430.0	0.3433
	59840.0	0.3136
	71010.0	0.2852
	84270.0	0.2584

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 2.547
q = 1.831
mu = 1.94
epsilonL = 9.382e-05
Eth = 22.77

Fit range

E = 22.77 – 100000