{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Be", "surface_phase": "pc", "species": {"text": "Ne+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Ne+ on Be(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 2.547, "q": 1.831, "mu": 1.94, "epsilonL": 9.382e-05, "Eth": 22.77}, "E_min": 22.77, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
22.77	0.0	
27.03	4.308e-05	
32.07	0.000233	
38.06	0.0007236	
45.17	0.001793	
53.6	0.003924	
63.6	0.007925	
75.48	0.01509	
89.57	0.02733	
106.3	0.04724	
126.1	0.07766	
149.7	0.1208	
177.6	0.1765	
210.8	0.2417	
250.1	0.3104	
296.8	0.3767	
352.3	0.4362	
418.0	0.4875	
496.1	0.5307	
588.7	0.567	
698.6	0.5977	
829.0	0.6239	
983.8	0.6463	
1167.0	0.6654	
1385.0	0.6814	
1644.0	0.6944	
1951.0	0.7045	
2315.0	0.7114	
2747.0	0.7151	
3260.0	0.7154	
3869.0	0.7122	
4591.0	0.7054	
5448.0	0.695	
6465.0	0.6811	
7672.0	0.6637	
9105.0	0.643	
10800.0	0.6194	
12820.0	0.5931	
15220.0	0.5647	
18060.0	0.5345	
21430.0	0.5031	
25430.0	0.4709	
30170.0	0.4384	
35810.0	0.406	
42490.0	0.3742	
50430.0	0.3433	
59840.0	0.3136	
71010.0	0.2852	
84270.0	0.2584	
-----