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Plasma-Surface Interaction Data Set 168

Sputtering of O⁺ on Be(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of O⁺ on Be(pc) at 300 K

angle = 0.0 deg	E /eV	P
	22.66	0.0
	26.9	0.0001371
	31.92	0.0006075
	37.89	0.001659
	44.96	0.003711
	53.36	0.007425
	63.33	0.01378
	75.17	0.02409
	89.21	0.03997
	105.9	0.06293
	125.6	0.0938
	149.1	0.132
	177.0	0.1752
	210.0	0.22
	249.3	0.2629
	295.8	0.3018
	351.1	0.3354
	416.7	0.3639
	494.5	0.3877
	586.9	0.4076
	696.6	0.4241
	826.7	0.4377
	981.1	0.4487
	1164.0	0.4574
	1382.0	0.4637
	1640.0	0.4677
	1946.0	0.4694
	2310.0	0.4687
	2742.0	0.4657
	3254.0	0.4602
	3862.0	0.4523
	4583.0	0.4421
	5439.0	0.4297
	6455.0	0.4152
	7661.0	0.3988
	9092.0	0.3808
	10790.0	0.3616
	12810.0	0.3413
	15200.0	0.3204
	18040.0	0.2991
	21410.0	0.2778
	25410.0	0.2566
	30150.0	0.236
	35790.0	0.216
	42470.0	0.1969
	50410.0	0.1787
	59820.0	0.1616
	71000.0	0.1457
	84260.0	0.1308

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 1.221
q = 1.202
mu = 1.688
epsilonL = 0.0001435
Eth = 22.66

Fit range

E = 22.66 – 100000