{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Be", "surface_phase": "pc", "species": {"text": "O+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of O+ on Be(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 1.221, "q": 1.202, "mu": 1.688, "epsilonL": 0.0001435, "Eth": 22.66}, "E_min": 22.66, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
22.66	0.0	
26.9	0.0001371	
31.92	0.0006075	
37.89	0.001659	
44.96	0.003711	
53.36	0.007425	
63.33	0.01378	
75.17	0.02409	
89.21	0.03997	
105.9	0.06293	
125.6	0.0938	
149.1	0.132	
177.0	0.1752	
210.0	0.22	
249.3	0.2629	
295.8	0.3018	
351.1	0.3354	
416.7	0.3639	
494.5	0.3877	
586.9	0.4076	
696.6	0.4241	
826.7	0.4377	
981.1	0.4487	
1164.0	0.4574	
1382.0	0.4637	
1640.0	0.4677	
1946.0	0.4694	
2310.0	0.4687	
2742.0	0.4657	
3254.0	0.4602	
3862.0	0.4523	
4583.0	0.4421	
5439.0	0.4297	
6455.0	0.4152	
7661.0	0.3988	
9092.0	0.3808	
10790.0	0.3616	
12810.0	0.3413	
15200.0	0.3204	
18040.0	0.2991	
21410.0	0.2778	
25410.0	0.2566	
30150.0	0.236	
35790.0	0.216	
42470.0	0.1969	
50410.0	0.1787	
59820.0	0.1616	
71000.0	0.1457	
84260.0	0.1308	
-----