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Plasma-Surface Interaction Data Set 167

Sputtering of N⁺ on Be(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of N⁺ on Be(pc) at 300 K

angle = 0.0 deg	E /eV	P
	16.54	6.395e-44
	19.76	6.147e-06
	23.6	5.387e-05
	28.19	0.0002289
	33.67	0.0007245
	40.22	0.001951
	48.04	0.00473
	57.39	0.01057
	68.54	0.02195
	81.87	0.04205
	97.79	0.07325
	116.8	0.1144
	139.5	0.1596
	166.7	0.2019
	199.1	0.237
	237.8	0.2645
	284.0	0.286
	339.2	0.303
	405.2	0.317
	484.0	0.3288
	578.1	0.3387
	690.6	0.3471
	824.8	0.3539
	985.2	0.3592
	1177.0	0.3628
	1406.0	0.3647
	1679.0	0.3648
	2006.0	0.363
	2396.0	0.3592
	2861.0	0.3535
	3418.0	0.3458
	4082.0	0.3362
	4876.0	0.3249
	5824.0	0.312
	6957.0	0.2977
	8310.0	0.2823
	9926.0	0.266
	11860.0	0.2492
	14160.0	0.2321
	16920.0	0.2149
	20200.0	0.1979
	24130.0	0.1813
	28830.0	0.1653
	34430.0	0.15
	41130.0	0.1356
	49130.0	0.122
	58680.0	0.1094
	70090.0	0.09778
	83720.0	0.08709

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 5.283
q = 0.9334
mu = 2.537
epsilonL = 0.000183
Eth = 16.54

Fit range

E = 16.54 – 100000