{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Be", "surface_phase": "pc", "species": {"text": "N+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of N+ on Be(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 5.283, "q": 0.9334, "mu": 2.537, "epsilonL": 0.000183, "Eth": 16.54}, "E_min": 16.54, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
16.54	6.395e-44	
19.76	6.147e-06	
23.6	5.387e-05	
28.19	0.0002289	
33.67	0.0007245	
40.22	0.001951	
48.04	0.00473	
57.39	0.01057	
68.54	0.02195	
81.87	0.04205	
97.79	0.07325	
116.8	0.1144	
139.5	0.1596	
166.7	0.2019	
199.1	0.237	
237.8	0.2645	
284.0	0.286	
339.2	0.303	
405.2	0.317	
484.0	0.3288	
578.1	0.3387	
690.6	0.3471	
824.8	0.3539	
985.2	0.3592	
1177.0	0.3628	
1406.0	0.3647	
1679.0	0.3648	
2006.0	0.363	
2396.0	0.3592	
2861.0	0.3535	
3418.0	0.3458	
4082.0	0.3362	
4876.0	0.3249	
5824.0	0.312	
6957.0	0.2977	
8310.0	0.2823	
9926.0	0.266	
11860.0	0.2492	
14160.0	0.2321	
16920.0	0.2149	
20200.0	0.1979	
24130.0	0.1813	
28830.0	0.1653	
34430.0	0.15	
41130.0	0.1356	
49130.0	0.122	
58680.0	0.1094	
70090.0	0.09778	
83720.0	0.08709	
-----