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Plasma-Surface Interaction Data Set 166

Sputtering of Be+ on Be(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Be+ on Be(pc) at 300 K

angle = 0.0 deg E /eV P
16.970.0
20.260.0002502
24.180.0008543
28.870.001984
34.470.00393
41.150.007123
49.130.01216
58.650.01984
70.020.03108
83.590.04684
99.80.06779
119.10.09398
142.20.1245
169.80.1574
202.70.1904
242.00.221
288.90.2476
344.90.2694
411.80.2863
491.60.2986
586.90.3068
700.70.3115
836.50.313
998.60.3117
1192.00.3079
1423.00.3019
1699.00.2939
2029.00.2842
2422.00.2729
2891.00.2604
3452.00.2468
4121.00.2325
4919.00.2177
5873.00.2026
7012.00.1875
8371.00.1726
9993.00.1581
11930.00.1441
14240.00.1307
17000.00.1181
20300.00.1063
24230.00.09529
28930.00.08514
34540.00.07583
41240.00.06733
49230.00.05963
58770.00.05267
70160.00.04641
83760.00.0408

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 16.97 – 100000