{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Be", "surface_phase": "pc", "species": {"text": "Be+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of Be+ on Be(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 2.033, "q": 0.8241, "mu": 1.344, "epsilonL": 0.0004529, "Eth": 16.97}, "E_min": 16.97, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
16.97	0.0	
20.26	0.0002502	
24.18	0.0008543	
28.87	0.001984	
34.47	0.00393	
41.15	0.007123	
49.13	0.01216	
58.65	0.01984	
70.02	0.03108	
83.59	0.04684	
99.8	0.06779	
119.1	0.09398	
142.2	0.1245	
169.8	0.1574	
202.7	0.1904	
242.0	0.221	
288.9	0.2476	
344.9	0.2694	
411.8	0.2863	
491.6	0.2986	
586.9	0.3068	
700.7	0.3115	
836.5	0.313	
998.6	0.3117	
1192.0	0.3079	
1423.0	0.3019	
1699.0	0.2939	
2029.0	0.2842	
2422.0	0.2729	
2891.0	0.2604	
3452.0	0.2468	
4121.0	0.2325	
4919.0	0.2177	
5873.0	0.2026	
7012.0	0.1875	
8371.0	0.1726	
9993.0	0.1581	
11930.0	0.1441	
14240.0	0.1307	
17000.0	0.1181	
20300.0	0.1063	
24230.0	0.09529	
28930.0	0.08514	
34540.0	0.07583	
41240.0	0.06733	
49230.0	0.05963	
58770.0	0.05267	
70160.0	0.04641	
83760.0	0.0408	
-----