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Plasma-Surface Interaction Data Set 165

Sputtering of 4He+ on Be(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of 4He+ on Be(pc) at 300 K

angle = 0.0 deg E /eV P
12.330.0
14.810.0001778
17.80.0008084
21.390.002245
25.710.005055
30.890.01001
37.120.01797
44.60.02946
53.60.04419
64.40.06073
77.390.07702
93.00.09125
111.70.1025
134.30.1108
161.40.1164
193.90.1198
233.00.1216
280.00.1219
336.40.1211
404.30.1192
485.80.1165
583.80.113
701.50.1088
842.90.1041
1013.00.09884
1217.00.09323
1463.00.08735
1758.00.08133
2112.00.07525
2538.00.06922
3050.00.06331
3664.00.05761
4403.00.05216
5291.00.047
6358.00.04218
7640.00.03769
9181.00.03356
11030.00.02977
13260.00.02633
15930.00.02322
19140.00.02041
23000.00.0179
27640.00.01566
33220.00.01367
39910.00.01191
47960.00.01036
57630.00.008992
69250.00.007793
83220.00.006743

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 12.33 – 100000