{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Be", "surface_phase": "pc", "species": {"text": "(4He)+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of (4He)+ on Be(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 1.474, "q": 0.3193, "mu": 1.699, "epsilonL": 0.00139, "Eth": 12.33}, "E_min": 12.33, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
12.33	0.0	
14.81	0.0001778	
17.8	0.0008084	
21.39	0.002245	
25.71	0.005055	
30.89	0.01001	
37.12	0.01797	
44.6	0.02946	
53.6	0.04419	
64.4	0.06073	
77.39	0.07702	
93.0	0.09125	
111.7	0.1025	
134.3	0.1108	
161.4	0.1164	
193.9	0.1198	
233.0	0.1216	
280.0	0.1219	
336.4	0.1211	
404.3	0.1192	
485.8	0.1165	
583.8	0.113	
701.5	0.1088	
842.9	0.1041	
1013.0	0.09884	
1217.0	0.09323	
1463.0	0.08735	
1758.0	0.08133	
2112.0	0.07525	
2538.0	0.06922	
3050.0	0.06331	
3664.0	0.05761	
4403.0	0.05216	
5291.0	0.047	
6358.0	0.04218	
7640.0	0.03769	
9181.0	0.03356	
11030.0	0.02977	
13260.0	0.02633	
15930.0	0.02322	
19140.0	0.02041	
23000.0	0.0179	
27640.0	0.01566	
33220.0	0.01367	
39910.0	0.01191	
47960.0	0.01036	
57630.0	0.008992	
69250.0	0.007793	
83220.0	0.006743	
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