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Plasma-Surface Interaction Data Set 164

Sputtering of 3He+ on Be(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of 3He+ on Be(pc) at 300 K

angle = 0.0 deg E /eV P
12.90.0
15.480.0004568
18.590.001907
22.320.004956
26.790.01044
32.160.01921
38.610.03164
46.360.04719
55.650.06422
66.810.08066
80.210.09488
96.30.1062
115.60.1145
138.80.1203
166.60.1241
200.10.1261
240.20.1267
288.30.1262
346.20.1246
415.60.1221
498.90.1188
599.00.1148
719.10.1101
863.30.1049
1036.00.0993
1244.00.09334
1494.00.08719
1793.00.08093
2153.00.07467
2585.00.06851
3103.00.06252
3726.00.05677
4473.00.0513
5370.00.04615
6447.00.04134
7739.00.0369
9291.00.03281
11150.00.02908
13390.00.0257
16080.00.02264
19300.00.0199
23170.00.01744
27820.00.01526
33400.00.01331
40100.00.0116
48140.00.01008
57790.00.008753
69380.00.007585
83300.00.006564

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 12.9 – 100000