{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Be", "surface_phase": "pc", "species": {"text": "(3He)+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of (3He)+ on Be(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.7725, "q": 0.331, "mu": 1.604, "epsilonL": 0.001503, "Eth": 12.9}, "E_min": 12.9, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
12.9	0.0	
15.48	0.0004568	
18.59	0.001907	
22.32	0.004956	
26.79	0.01044	
32.16	0.01921	
38.61	0.03164	
46.36	0.04719	
55.65	0.06422	
66.81	0.08066	
80.21	0.09488	
96.3	0.1062	
115.6	0.1145	
138.8	0.1203	
166.6	0.1241	
200.1	0.1261	
240.2	0.1267	
288.3	0.1262	
346.2	0.1246	
415.6	0.1221	
498.9	0.1188	
599.0	0.1148	
719.1	0.1101	
863.3	0.1049	
1036.0	0.0993	
1244.0	0.09334	
1494.0	0.08719	
1793.0	0.08093	
2153.0	0.07467	
2585.0	0.06851	
3103.0	0.06252	
3726.0	0.05677	
4473.0	0.0513	
5370.0	0.04615	
6447.0	0.04134	
7739.0	0.0369	
9291.0	0.03281	
11150.0	0.02908	
13390.0	0.0257	
16080.0	0.02264	
19300.0	0.0199	
23170.0	0.01744	
27820.0	0.01526	
33400.0	0.01331	
40100.0	0.0116	
48140.0	0.01008	
57790.0	0.008753	
69380.0	0.007585	
83300.0	0.006564	
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