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Plasma-Surface Interaction Data Set 163

Sputtering of T⁺ on Be(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of T⁺ on Be(pc) at 300 K

angle = 0.0 deg	E /eV	P
	9.434	0.0
	11.4	0.000126
	13.77	0.0005191
	16.64	0.001355
	20.11	0.002908
	24.29	0.005527
	29.35	0.009549
	35.46	0.01511
	42.85	0.02191
	51.77	0.02921
	62.55	0.03605
	75.57	0.04168
	91.31	0.04579
	110.3	0.04843
	133.3	0.0498
	161.0	0.05017
	194.6	0.04975
	235.1	0.04872
	284.0	0.0472
	343.2	0.04531
	414.7	0.04312
	501.0	0.04071
	605.3	0.03815
	731.4	0.0355
	883.7	0.03281
	1068.0	0.03013
	1290.0	0.0275
	1559.0	0.02496
	1883.0	0.02253
	2275.0	0.02024
	2749.0	0.0181
	3321.0	0.01612
	4013.0	0.0143
	4849.0	0.01263
	5858.0	0.01113
	7078.0	0.009769
	8552.0	0.008552
	10330.0	0.007466
	12480.0	0.006503
	15080.0	0.00565
	18220.0	0.004899
	22020.0	0.004239
	26600.0	0.003662
	32140.0	0.003158
	38840.0	0.002719
	46930.0	0.002337
	56700.0	0.002006
	68500.0	0.00172
	82770.0	0.001473

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 2.079
q = 0.1379
mu = 1.566
epsilonL = 0.003247
Eth = 9.434

Fit range

E = 9.434 – 100000