{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Be", "surface_phase": "pc", "species": {"text": "T+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of T+ on Be(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 2.079, "q": 0.1379, "mu": 1.566, "epsilonL": 0.003247, "Eth": 9.434}, "E_min": 9.434, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
9.434	0.0	
11.4	0.000126	
13.77	0.0005191	
16.64	0.001355	
20.11	0.002908	
24.29	0.005527	
29.35	0.009549	
35.46	0.01511	
42.85	0.02191	
51.77	0.02921	
62.55	0.03605	
75.57	0.04168	
91.31	0.04579	
110.3	0.04843	
133.3	0.0498	
161.0	0.05017	
194.6	0.04975	
235.1	0.04872	
284.0	0.0472	
343.2	0.04531	
414.7	0.04312	
501.0	0.04071	
605.3	0.03815	
731.4	0.0355	
883.7	0.03281	
1068.0	0.03013	
1290.0	0.0275	
1559.0	0.02496	
1883.0	0.02253	
2275.0	0.02024	
2749.0	0.0181	
3321.0	0.01612	
4013.0	0.0143	
4849.0	0.01263	
5858.0	0.01113	
7078.0	0.009769	
8552.0	0.008552	
10330.0	0.007466	
12480.0	0.006503	
15080.0	0.00565	
18220.0	0.004899	
22020.0	0.004239	
26600.0	0.003662	
32140.0	0.003158	
38840.0	0.002719	
46930.0	0.002337	
56700.0	0.002006	
68500.0	0.00172	
82770.0	0.001473	
-----