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Plasma-Surface Interaction Data Set 162

Sputtering of D+ on Be(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of D+ on Be(pc) at 300 K

angle = 0.0 deg E /eV P
9.5060.0
11.486.355e-05
13.870.0003663
16.760.001179
20.250.002937
24.460.006169
29.540.01119
35.690.01764
43.120.02437
52.090.03016
62.920.0344
76.010.03711
91.830.03862
110.90.03925
134.00.03923
161.90.03874
195.60.03787
236.30.03669
285.40.03527
344.80.03364
416.50.03185
503.20.02993
607.80.02794
734.30.0259
887.10.02386
1072.00.02185
1295.00.01988
1564.00.018
1889.00.01621
2282.00.01453
2757.00.01297
3331.00.01153
4024.00.01021
4861.00.009007
5872.00.007921
7093.00.006945
8569.00.006073
10350.00.005296
12510.00.004608
15110.00.004
18250.00.003466
22050.00.002997
26630.00.002587
32170.00.002229
38870.00.001918
46950.00.001648
56720.00.001414
68520.00.001212
82780.00.001037

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 9.506 – 100000