{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Be", "surface_phase": "pc", "species": {"text": "D+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of D+ on Be(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 1.758, "q": 0.1044, "mu": 1.991, "epsilonL": 0.003545, "Eth": 9.506}, "E_min": 9.506, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
9.506	0.0	
11.48	6.355e-05	
13.87	0.0003663	
16.76	0.001179	
20.25	0.002937	
24.46	0.006169	
29.54	0.01119	
35.69	0.01764	
43.12	0.02437	
52.09	0.03016	
62.92	0.0344	
76.01	0.03711	
91.83	0.03862	
110.9	0.03925	
134.0	0.03923	
161.9	0.03874	
195.6	0.03787	
236.3	0.03669	
285.4	0.03527	
344.8	0.03364	
416.5	0.03185	
503.2	0.02993	
607.8	0.02794	
734.3	0.0259	
887.1	0.02386	
1072.0	0.02185	
1295.0	0.01988	
1564.0	0.018	
1889.0	0.01621	
2282.0	0.01453	
2757.0	0.01297	
3331.0	0.01153	
4024.0	0.01021	
4861.0	0.009007	
5872.0	0.007921	
7093.0	0.006945	
8569.0	0.006073	
10350.0	0.005296	
12510.0	0.004608	
15110.0	0.004	
18250.0	0.003466	
22050.0	0.002997	
26630.0	0.002587	
32170.0	0.002229	
38870.0	0.001918	
46950.0	0.001648	
56720.0	0.001414	
68520.0	0.001212	
82780.0	0.001037	
-----