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Plasma-Surface Interaction Data Set 161

Sputtering of H+ on Be(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of H+ on Be(pc) at 300 K

angle = 0.0 deg E /eV P
14.344.558e-27
17.180.0002365
20.580.000896
24.650.002135
29.530.004086
35.380.006729
42.380.009807
50.770.01289
60.820.01559
72.860.01767
87.280.01909
104.60.01994
125.30.02032
150.10.02033
179.80.02007
215.30.01959
258.00.01894
309.00.01816
370.20.01727
443.50.01631
531.30.0153
636.40.01426
762.40.01321
913.30.01217
1094.00.01115
1311.00.01016
1570.00.009211
1881.00.008316
2253.00.007476
2699.00.006695
3234.00.005973
3874.00.005312
4640.00.004709
5559.00.004162
6659.00.003668
7978.00.003226
9557.00.00283
11450.00.002477
13710.00.002164
16430.00.001887
19680.00.001642
23580.00.001427
28240.00.001238
33840.00.001073
40530.00.0009283
48560.00.0008023
58170.00.0006926
69680.00.0005972
83480.00.0005144

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 14.34 – 100000