{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Be", "surface_phase": "pc", "species": {"text": "H+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of H+ on Be(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.8007, "q": 0.0564, "mu": 1.515, "epsilonL": 0.003898, "Eth": 14.34}, "E_min": 14.34, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
14.34	4.558e-27	
17.18	0.0002365	
20.58	0.000896	
24.65	0.002135	
29.53	0.004086	
35.38	0.006729	
42.38	0.009807	
50.77	0.01289	
60.82	0.01559	
72.86	0.01767	
87.28	0.01909	
104.6	0.01994	
125.3	0.02032	
150.1	0.02033	
179.8	0.02007	
215.3	0.01959	
258.0	0.01894	
309.0	0.01816	
370.2	0.01727	
443.5	0.01631	
531.3	0.0153	
636.4	0.01426	
762.4	0.01321	
913.3	0.01217	
1094.0	0.01115	
1311.0	0.01016	
1570.0	0.009211	
1881.0	0.008316	
2253.0	0.007476	
2699.0	0.006695	
3234.0	0.005973	
3874.0	0.005312	
4640.0	0.004709	
5559.0	0.004162	
6659.0	0.003668	
7978.0	0.003226	
9557.0	0.00283	
11450.0	0.002477	
13710.0	0.002164	
16430.0	0.001887	
19680.0	0.001642	
23580.0	0.001427	
28240.0	0.001238	
33840.0	0.001073	
40530.0	0.0009283	
48560.0	0.0008023	
58170.0	0.0006926	
69680.0	0.0005972	
83480.0	0.0005144	
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