{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "LiOD", "surface_phase": "a", "species": {"text": "D", "charge": 0}, "temperature": 300, "comment": "", "refs": [{"id": 4, "authors": "P. S. Krstic, E. T. Ostrowski, S. Dwivedi, S. Abe, A. Maan, A. C. T. Van Duin, B. E. Koel", "title": "Detailed studies of the processes in low energy H irradiation of Li and Li-compound surfaces", "journal": "Journal of Applied Physics", "volume": "134", "page_start": "", "page_end": "", "article_number": "", "year": 2023, "note": "", "doi": "10.1063/5.0149502", "bibcode": "2023JAP...134j0902K", "url": "https://dx.doi.org/10.1063/5.0149502"}]} ------------------------------------------------------------------------ Sputtering of D on LiOD(a) at 300 K angle = 0.0 deg E /eV P unc 1.0 0.0014 0.0014 5.0 0.0068 0.0026 10.0 0.002 0.0014 25.0 0.0123 0.0043 50.0 0.0425 0.0082 75.0 0.0514 0.0091 100.0 0.05 0.0093 -----