{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "LiOH", "surface_phase": "a", "species": {"text": "H", "charge": 0}, "temperature": 300, "comment": "", "refs": [{"id": 4, "authors": "P. S. Krstic, E. T. Ostrowski, S. Dwivedi, S. Abe, A. Maan, A. C. T. Van Duin, B. E. Koel", "title": "Detailed studies of the processes in low energy H irradiation of Li and Li-compound surfaces", "journal": "Journal of Applied Physics", "volume": "134", "page_start": "", "page_end": "", "article_number": "", "year": 2023, "note": "", "doi": "10.1063/5.0149502", "bibcode": "2023JAP...134j0902K", "url": "https://dx.doi.org/10.1063/5.0149502"}]} ------------------------------------------------------------------------ Sputtering of H on LiOH(a) at 300 K angle = 0.0 deg E /eV P unc 1.0 0.0059 0.0024 5.0 0.0059 0.0024 10.0 0.0147 0.0038 25.0 0.0435 0.0066 50.0 0.0613 0.0079 75.0 0.0624 0.0089 100.0 0.0738 0.0087 ----- angle = 85.0 deg E /eV P unc 1.0 0.0061 0.0025 5.0 0.0078 0.0028 10.0 0.0137 0.0037 25.0 0.0395 0.0063 50.0 0.0467 0.0068 75.0 0.0597 0.0076 100.0 0.0695 0.0082 ----- Sputtering of H on LiOH(a) at 300 K E = 1.0 eV angle /deg P unc 0.0 0.0059 0.0024 85.0 0.0061 0.0025 ----- E = 5.0 eV angle /deg P unc 0.0 0.0059 0.0024 85.0 0.0078 0.0028 ----- E = 10.0 eV angle /deg P unc 0.0 0.0147 0.0038 85.0 0.0137 0.0037 ----- E = 25.0 eV angle /deg P unc 0.0 0.0435 0.0066 85.0 0.0395 0.0063 ----- E = 50.0 eV angle /deg P unc 0.0 0.0613 0.0079 85.0 0.0467 0.0068 ----- E = 75.0 eV angle /deg P unc 0.0 0.0624 0.0089 85.0 0.0597 0.0076 ----- E = 100.0 eV angle /deg P unc 0.0 0.0738 0.0087 85.0 0.0695 0.0082 -----