{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "W", "surface_phase": "pc", "species": {"text": "D+", "charge": 1}, "temperature": 300, "comment": "", "refs": [{"id": 151, "authors": "J. Bohdansky, G. Chen, W. Eckstein, J. Roth, B. Scherzer, R. Behrisch", "title": "Light ion sputtering for H, D and He in the energy range of 25 keV to 100 keV", "journal": "Journal of Nuclear Materials", "volume": "111-112", "page_start": "717", "page_end": "725", "article_number": "", "year": 1982, "note": "", "doi": "10.1016/0022-3115(82)90295-1", "bibcode": "1982JNuM..111..717B", "url": "https://dx.doi.org/10.1016/0022-3115(82)90295-1"}], "json_data": [{"x1": {"name": "angle", "units": "deg", "value": 0}, "x2": {"name": "E", "units": "eV", "data": {"2.50e+02": {"P": 0.0001478}, "3.49e+02": {"P": 0.0003041}, "5.03e+02": {"P": 0.0006888}, "1.01e+03": {"P": 0.002082}, "1.50e+03": {"P": 0.004717}, "2.03e+03": {"P": 0.004388}, "4.00e+03": {"P": 0.00693}, "7.99e+03": {"P": 0.006448}, "1.48e+04": {"P": 0.004717}, "3.04e+04": {"P": 0.004083}, "4.93e+04": {"P": 0.004388}, "4.99e+04": {"P": 0.002405}, "9.97e+04": {"P": 0.002713}}}}]}