{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "B", "surface_phase": "pc", "species": {"text": "B+", "charge": 1}, "temperature": 300, "comment": "", "refs": [{"id": 146, "authors": "E. Hechtl, A. Mazanec, W. Eckstein, J. Roth, C. Garc\u00eda-Rosales", "title": "Sputtering behavior of boron and boron carbide", "journal": "Journal of Nuclear Materials", "volume": "196-198", "page_start": "713", "page_end": "716", "article_number": "", "year": 1992, "note": "", "doi": "10.1016/S0022-3115(06)80129-7", "bibcode": "", "url": ""}], "json_data": [{"x1": {"name": "angle", "units": "deg", "value": 0}, "x2": {"name": "E", "units": "eV", "data": {"1.54e+02": {"P": 0.1134}, "3.00e+02": {"P": 0.3383}, "9.84e+02": {"P": 0.4881}, "2.12e+03": {"P": 0.6723}, "3.04e+03": {"P": 0.6883}, "9.77e+03": {"P": 0.6747}}}}]}