{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "W", "surface_phase": "pc", "species": {"text": "(4He)+", "charge": 1}, "temperature": 300, "comment": "", "refs": [{"id": 157, "authors": "M. I. Guseva, Y. V. Martynenko", "title": "", "journal": "Fizika Plazmy", "volume": "2", "page_start": "593", "page_end": "", "article_number": "", "year": 1976, "note": "", "doi": "", "bibcode": "", "url": ""}]}
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