{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "W", "surface_phase": "pc", "species": {"text": "(4He)+", "charge": 1}, "temperature": 300, "comment": "", "refs": [{"id": 156, "authors": "D. Rosenberg, G. K. Wehner", "title": "Sputtering Yields for Low Energy He+-, Kr+-, and Xe+-Ion Bombardment", "journal": "Journal of Applied Physics", "volume": "33", "page_start": "1842", "page_end": "1845", "article_number": "", "year": 1962, "note": "", "doi": "10.1063/1.1728843", "bibcode": "1962JAP....33.1842R", "url": "https://dx.doi.org/10.1063/1.1728843"}], "json_data": [{"x1": {"name": "angle", "units": "deg", "value": 0}, "x2": {"name": "E", "units": "eV", "data": {"2.00e+02": {"P": 0.001046}, "2.97e+02": {"P": 0.00414}, "4.00e+02": {"P": 0.006191}, "6.07e+02": {"P": 0.008027}}}}]}