{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "U", "surface_phase": "pc", "species": {"text": "D+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of D+ on U(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1807, "q": 0.0266, "mu": 1.276, "epsilonL": 7.584e-05, "Eth": 189.3}, "E_min": 189.3, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
189.3	0.0	
215.2	0.0001129	
244.5	0.0003267	
277.9	0.0006453	
315.8	0.001079	
358.9	0.001631	
407.9	0.002293	
463.6	0.003042	
526.9	0.003845	
598.8	0.004667	
680.6	0.005471	
773.5	0.006228	
879.0	0.006921	
999.0	0.007539	
1135.0	0.008081	
1290.0	0.008549	
1466.0	0.008948	
1667.0	0.009284	
1894.0	0.009564	
2153.0	0.009793	
2446.0	0.009976	
2780.0	0.01012	
3160.0	0.01021	
3591.0	0.01028	
4081.0	0.0103	
4639.0	0.01029	
5272.0	0.01025	
5991.0	0.01017	
6809.0	0.01006	
7738.0	0.009916	
8795.0	0.009745	
9995.0	0.009544	
11360.0	0.009317	
12910.0	0.009065	
14670.0	0.00879	
16670.0	0.008496	
18950.0	0.008184	
21540.0	0.007859	
24480.0	0.007522	
27820.0	0.007176	
31610.0	0.006826	
35930.0	0.006473	
40830.0	0.006121	
46410.0	0.005772	
52740.0	0.005428	
59940.0	0.005091	
68120.0	0.004763	
77420.0	0.004445	
87990.0	0.004139	
-----