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Plasma-Surface Interaction Data Set 511

Sputtering of He⁺ on Pb(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of He⁺ on Pb(pc) at 300 K

angle = 0.0 deg	E /eV	P
	31.77	0.0
	37.44	0.0003307
	44.13	0.001387
	52.01	0.003528
	61.31	0.007162
	72.26	0.01257
	85.17	0.01974
	100.4	0.02826
	118.3	0.03748
	139.5	0.04675
	164.4	0.05561
	193.7	0.06388
	228.4	0.07152
	269.2	0.07862
	317.2	0.08528
	373.9	0.09159
	440.7	0.09764
	519.5	0.1035
	612.3	0.1091
	721.7	0.1146
	850.6	0.12
	1003.0	0.1251
	1182.0	0.13
	1393.0	0.1347
	1642.0	0.1392
	1935.0	0.1433
	2281.0	0.1471
	2688.0	0.1504
	3168.0	0.1533
	3734.0	0.1558
	4402.0	0.1576
	5188.0	0.1589
	6115.0	0.1595
	7207.0	0.1595
	8495.0	0.1587
	10010.0	0.1573
	11800.0	0.155
	13910.0	0.1521
	16400.0	0.1484
	19320.0	0.1441
	22780.0	0.1391
	26850.0	0.1336
	31640.0	0.1277
	37300.0	0.1213
	43960.0	0.1147
	51810.0	0.1078
	61070.0	0.1009
	71980.0	0.09392
	84840.0	0.08704

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.0686
q = 0.4081
mu = 1.666
epsilonL = 4.303e-05
Eth = 31.77

Fit range

E = 31.77 – 100000