pwiDB

Plasma-Surface Interaction Data Set 509

Sputtering of Kr⁺ on Hg(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Kr⁺ on Hg(pc) at 300 K

angle = 0.0 deg	E /eV	P
	24.75	7.383e-37
	29.32	0.0001028
	34.73	0.0006509
	41.14	0.002219
	48.74	0.005848
	57.74	0.01327
	68.41	0.02706
	81.04	0.0504
	96.01	0.08618
	113.7	0.1355
	134.7	0.1966
	159.6	0.2656
	189.1	0.3383
	224.0	0.4118
	265.4	0.4853
	314.4	0.559
	372.5	0.6339
	441.3	0.7112
	522.8	0.7919
	619.3	0.8769
	733.7	0.9671
	869.2	1.063
	1030.0	1.165
	1220.0	1.274
	1445.0	1.389
	1712.0	1.512
	2028.0	1.642
	2403.0	1.778
	2847.0	1.922
	3373.0	2.073
	3995.0	2.23
	4733.0	2.394
	5607.0	2.563
	6643.0	2.738
	7870.0	2.917
	9323.0	3.099
	11050.0	3.284
	13090.0	3.472
	15500.0	3.659
	18360.0	3.847
	21760.0	4.032
	25770.0	4.214
	30530.0	4.392
	36170.0	4.563
	42850.0	4.727
	50770.0	4.88
	60140.0	5.022
	71250.0	5.151
	84410.0	5.265

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.0964
q = 14.16
mu = 2.15
epsilonL = 1.468e-06
Eth = 24.75

Fit range

E = 24.75 – 100000