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Plasma-Surface Interaction Data Set 499

Sputtering of T⁺ on Au(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of T⁺ on Au(pc) at 300 K

angle = 0.0 deg	E /eV	P
	74.86	0.0
	86.7	0.0003138
	100.4	0.001073
	116.3	0.00239
	134.7	0.004406
	156.0	0.007229
	180.7	0.01087
	209.3	0.01523
	242.4	0.02006
	280.8	0.02507
	325.2	0.02997
	376.7	0.03456
	436.2	0.03871
	505.3	0.04238
	585.2	0.04559
	677.8	0.04837
	785.0	0.05079
	909.3	0.05289
	1053.0	0.0547
	1220.0	0.05625
	1413.0	0.05757
	1636.0	0.05866
	1895.0	0.05954
	2195.0	0.06019
	2542.0	0.06064
	2945.0	0.06086
	3410.0	0.06085
	3950.0	0.06062
	4575.0	0.06016
	5299.0	0.05946
	6137.0	0.05854
	7108.0	0.05739
	8233.0	0.05603
	9536.0	0.05447
	11040.0	0.05273
	12790.0	0.05082
	14820.0	0.04877
	17160.0	0.0466
	19870.0	0.04434
	23020.0	0.04202
	26660.0	0.03966
	30880.0	0.03728
	35770.0	0.03492
	41420.0	0.03258
	47980.0	0.0303
	55570.0	0.02808
	64360.0	0.02594
	74540.0	0.02389
	86340.0	0.02195

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.168
q = 0.156
mu = 1.442
epsilonL = 9.207e-05
Eth = 74.86

Fit range

E = 74.86 – 100000