{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Os", "surface_phase": "pc", "species": {"text": "T+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]} ------------------------------------------------------------------------ Sputtering of T+ on Os(pc) at 300 K {"fit_function": "SPTEEX", "coeffs": {"lambda": 0.31, "q": 0.0507, "mu": 1.544, "epsilonL": 9.683e-05, "Eth": 148.1}, "E_min": 148.1, "E_max": 100000} angle = 0.0 deg E /eV P 148.1 2.842e-27 169.2 7.969e-05 193.2 0.0002897 220.7 0.0006684 252.1 0.001267 288.0 0.002134 328.9 0.003295 375.7 0.004738 429.1 0.006404 490.1 0.008194 559.8 0.009994 639.4 0.0117 730.3 0.01324 834.2 0.01459 952.8 0.01573 1088.0 0.01668 1243.0 0.01746 1420.0 0.01809 1622.0 0.0186 1852.0 0.01899 2116.0 0.01929 2417.0 0.0195 2760.0 0.01962 3153.0 0.01968 3601.0 0.01965 4113.0 0.01956 4698.0 0.0194 5366.0 0.01918 6129.0 0.01889 7001.0 0.01854 7996.0 0.01813 9133.0 0.01767 10430.0 0.01716 11920.0 0.0166 13610.0 0.01601 15550.0 0.01538 17760.0 0.01473 20280.0 0.01405 23170.0 0.01336 26460.0 0.01266 30220.0 0.01196 34520.0 0.01127 39430.0 0.01058 45030.0 0.009911 51440.0 0.009255 58750.0 0.008621 67110.0 0.008009 76650.0 0.007424 87550.0 0.006865 -----