{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "W", "surface_phase": "pc", "species": {"text": "D+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of D+ on W(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.3583, "q": 0.0183, "mu": 1.441, "epsilonL": 0.0001008, "Eth": 228.8}, "E_min": 228.8, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
228.8	0.0	
259.1	4.325e-05	
293.3	0.0001427	
332.0	0.0003076	
375.9	0.0005522	
425.6	0.000888	
481.8	0.001319	
545.4	0.00184	
617.5	0.002428	
699.1	0.003056	
791.4	0.003687	
896.0	0.004289	
1014.0	0.004839	
1148.0	0.005322	
1300.0	0.005734	
1472.0	0.006075	
1666.0	0.006352	
1886.0	0.006571	
2136.0	0.006738	
2418.0	0.006861	
2737.0	0.006945	
3099.0	0.006994	
3508.0	0.007011	
3971.0	0.006999	
4496.0	0.006961	
5090.0	0.006898	
5762.0	0.006812	
6524.0	0.006705	
7385.0	0.006578	
8361.0	0.006431	
9466.0	0.006268	
10720.0	0.00609	
12130.0	0.005897	
13730.0	0.005693	
15550.0	0.005479	
17600.0	0.005257	
19930.0	0.005029	
22560.0	0.004796	
25540.0	0.004562	
28920.0	0.004326	
32740.0	0.004092	
37060.0	0.003861	
41960.0	0.003633	
47500.0	0.003411	
53770.0	0.003194	
60880.0	0.002985	
68920.0	0.002784	
78020.0	0.002591	
88330.0	0.002407	
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