{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Cs", "surface_phase": "pc", "species": {"text": "Cs+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}], "json_data": [{"x1": {"name": "angle", "units": "deg", "value": 0}, "x2": {"name": "E", "units": "eV", "data": {"4.498": {"P": 0}, "5.518": {"P": 0.0001112}, "6.768": {"P": 0.0005624}, "8.302": {"P": 0.001712}, "10.18": {"P": 0.004232}, "12.49": {"P": 0.009304}, "15.32": {"P": 0.01889}, "18.79": {"P": 0.03602}, "23.05": {"P": 0.06482}, "28.28": {"P": 0.1101}, "34.69": {"P": 0.1762}, "42.55": {"P": 0.265}, "52.19": {"P": 0.3757}, "64.02": {"P": 0.5047}, "78.53": {"P": 0.6482}, "96.33": {"P": 0.8036}, "118.2": {"P": 0.9703}, "144.9": {"P": 1.149}, "177.8": {"P": 1.343}, "218.1": {"P": 1.553}, "267.5": {"P": 1.784}, "328.1": {"P": 2.037}, "402.5": {"P": 2.317}, "493.7": {"P": 2.625}, "605.6": {"P": 2.965}, "742.8": {"P": 3.339}, "911.2": {"P": 3.749}, "1118.0": {"P": 4.198}, "1371.0": {"P": 4.687}, "1682.0": {"P": 5.219}, "2063.0": {"P": 5.794}, "2530.0": {"P": 6.414}, "3104.0": {"P": 7.078}, "3807.0": {"P": 7.787}, "4670.0": {"P": 8.538}, "5728.0": {"P": 9.331}, "7026.0": {"P": 10.16}, "8619.0": {"P": 11.03}, "10570.0": {"P": 11.93}, "12970.0": {"P": 12.85}, "15910.0": {"P": 13.79}, "19510.0": {"P": 14.74}, "23930.0": {"P": 15.7}, "29360.0": {"P": 16.65}, "36010.0": {"P": 17.59}, "44170.0": {"P": 18.5}, "54180.0": {"P": 19.37}, "66460.0": {"P": 20.19}, "81520.0": {"P": 20.95}}}, "fit": {"fit_function": "SPTEEX", "coeffs": {"lambda": 0.131, "q": 59.83, "mu": 1.773, "epsilonL": 9.999e-07, "Eth": 4.498}, "E_min": 4.498, "E_max": 100000}}]}