pwiDB

Plasma-Surface Interaction Data Set 410

Sputtering of Sn⁺ on Sn(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Sn⁺ on Sn(pc) at 300 K

angle = 0.0 deg	E /eV	P
	15.77	0.0
	18.85	9.904e-05
	22.54	0.0005757
	26.95	0.001878
	32.22	0.004833
	38.53	0.01087
	46.06	0.02233
	55.07	0.04262
	65.85	0.0761
	78.73	0.1272
	94.13	0.1985
	112.5	0.2894
	134.6	0.3961
	160.9	0.513
	192.4	0.6355
	230.0	0.7612
	275.0	0.8897
	328.8	1.022
	393.1	1.16
	470.0	1.305
	562.0	1.459
	671.9	1.624
	803.3	1.8
	960.5	1.989
	1148.0	2.191
	1373.0	2.408
	1642.0	2.64
	1963.0	2.886
	2347.0	3.149
	2806.0	3.426
	3355.0	3.719
	4011.0	4.027
	4796.0	4.348
	5734.0	4.683
	6856.0	5.031
	8197.0	5.388
	9800.0	5.755
	11720.0	6.13
	14010.0	6.509
	16750.0	6.891
	20030.0	7.274
	23950.0	7.653
	28630.0	8.027
	34230.0	8.392
	40930.0	8.745
	48930.0	9.081
	58510.0	9.397
	69950.0	9.689
	83640.0	9.952

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.1494
q = 27.36
mu = 2.014
epsilonL = 1.249e-06
Eth = 15.77

Fit range

E = 15.77 – 100000