pwiDB

Plasma-Surface Interaction Data Set 391

Sputtering of Ag⁺ on Ag(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Ag⁺ on Ag(pc) at 300 K

angle = 0.0 deg	E /eV	P
	15.23	0.0
	18.23	6.955e-05
	21.81	0.000553
	26.09	0.002205
	31.22	0.006614
	37.35	0.01688
	44.69	0.0384
	53.47	0.07927
	63.98	0.1487
	76.55	0.2522
	91.59	0.3871
	109.6	0.542
	131.1	0.7045
	156.9	0.8668
	187.7	1.028
	224.6	1.189
	268.7	1.355
	321.5	1.528
	384.6	1.711
	460.2	1.908
	550.6	2.119
	658.8	2.347
	788.2	2.592
	943.1	2.856
	1128.0	3.14
	1350.0	3.445
	1615.0	3.77
	1933.0	4.116
	2312.0	4.482
	2767.0	4.87
	3310.0	5.278
	3961.0	5.705
	4739.0	6.15
	5670.0	6.613
	6784.0	7.09
	8117.0	7.58
	9711.0	8.081
	11620.0	8.589
	13900.0	9.102
	16630.0	9.616
	19900.0	10.13
	23810.0	10.63
	28490.0	11.13
	34090.0	11.6
	40780.0	12.06
	48800.0	12.49
	58380.0	12.89
	69850.0	13.25
	83580.0	13.57

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.1687
q = 36.62
mu = 2.409
epsilonL = 1.443e-06
Eth = 15.23

Fit range

E = 15.23 – 100000