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Plasma-Surface Interaction Data Set 383

Sputtering of T+ on Ag(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of T+ on Ag(pc) at 300 K

angle = 0.0 deg E /eV P
33.770.0
39.760.0003909
46.80.001463
55.090.003486
64.850.006799
76.340.01168
89.870.01821
105.80.02614
124.50.03491
146.60.04386
172.60.05237
203.20.06007
239.20.06682
281.50.07264
331.40.07761
390.20.08186
459.30.0855
540.70.0886
636.50.09123
749.20.09343
882.00.0952
1038.00.09656
1222.00.09751
1439.00.09803
1694.00.09811
1994.00.09774
2347.00.09692
2763.00.09564
3253.00.09391
3829.00.09174
4507.00.08916
5306.00.0862
6246.00.08289
7353.00.07928
8656.00.07544
10190.00.0714
12000.00.06724
14120.00.063
16620.00.05875
19570.00.05454
23030.00.0504
27120.00.04639
31920.00.04252
37580.00.03883
44240.00.03534
52070.00.03205
61300.00.02898
72160.00.02613
84950.00.02349

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 33.77 – 100000