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Plasma-Surface Interaction Data Set 331

Sputtering of H+ on Nb(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of H+ on Nb(pc) at 300 K

angle = 0.0 deg E /eV P
210.90.0
239.13.785e-05
271.20.0001149
307.50.0002355
348.70.0004069
395.40.0006351
448.40.0009208
508.50.001258
576.60.001634
653.90.002028
741.50.002418
840.90.002784
953.60.003111
1081.00.003389
1226.00.003614
1391.00.00379
1577.00.003917
1788.00.004003
2028.00.004052
2300.00.00407
2608.00.004059
2957.00.004025
3353.00.003971
3803.00.003899
4312.00.003811
4890.00.003711
5545.00.003599
6288.00.003478
7131.00.003349
8087.00.003214
9170.00.003075
10400.00.002932
11790.00.002787
13370.00.002642
15160.00.002497
17200.00.002354
19500.00.002213
22110.00.002076
25080.00.001942
28440.00.001813
32250.00.001689
36570.00.00157
41470.00.001457
47020.00.001349
53330.00.001247
60470.00.00115
68570.00.00106
77760.00.0009749
88180.00.0008955

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 210.9 – 100000