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Plasma-Surface Interaction Data Set 273

Sputtering of T+ on Co(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of T+ on Co(pc) at 300 K

angle = 0.0 deg E /eV P
30.510.0
35.990.0003507
42.450.001263
50.080.002942
59.080.005643
69.690.009569
82.210.01475
96.970.02097
114.40.02775
134.90.03454
159.20.04085
187.80.04639
221.50.05107
261.30.05491
308.20.05801
363.60.06046
428.90.06236
506.00.06378
596.80.06478
704.10.06538
830.50.06562
979.70.06549
1156.00.06502
1363.00.06421
1608.00.06308
1897.00.06163
2238.00.05989
2640.00.05788
3114.00.05563
3673.00.05317
4333.00.05055
5112.00.0478
6030.00.04496
7113.00.04208
8391.00.03918
9898.00.03632
11680.00.03351
13770.00.03079
16250.00.02818
19170.00.02569
22610.00.02334
26670.00.02113
31460.00.01907
37110.00.01716
43780.00.01539
51640.00.01378
60920.00.0123
71860.00.01096
84770.00.009743

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 30.51 – 100000