pwiDB

Plasma-Surface Interaction Data Set 268

Sputtering of Fe⁺ on Fe(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Fe⁺ on Fe(pc) at 300 K

angle = 0.0 deg	E /eV	P
	13.77	0.0
	16.51	0.0001023
	19.79	0.0005077
	23.73	0.001502
	28.45	0.003599
	34.11	0.007669
	40.89	0.01512
	49.03	0.02812
	58.78	0.0497
	70.48	0.08365
	84.5	0.1338
	101.3	0.2029
	121.5	0.291
	145.6	0.395
	174.6	0.5099
	209.3	0.6303
	251.0	0.7524
	300.9	0.8744
	360.8	0.996
	432.5	1.118
	518.6	1.241
	621.8	1.367
	745.5	1.496
	893.8	1.629
	1072.0	1.766
	1285.0	1.907
	1540.0	2.053
	1847.0	2.202
	2214.0	2.354
	2655.0	2.509
	3183.0	2.665
	3816.0	2.822
	4575.0	2.979
	5486.0	3.135
	6577.0	3.287
	7885.0	3.435
	9454.0	3.578
	11330.0	3.713
	13590.0	3.839
	16290.0	3.955
	19530.0	4.058
	23420.0	4.146
	28080.0	4.219
	33670.0	4.273
	40370.0	4.308
	48400.0	4.321
	58020.0	4.311
	69570.0	4.278
	83410.0	4.221

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.3409
q = 11.05
mu = 1.805
epsilonL = 5.744e-06
Eth = 13.77

Fit range

E = 13.77 – 100000