{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Fe", "surface_phase": "pc", "species": {"text": "(4He)+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of (4He)+ on Fe(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1836, "q": 0.3347, "mu": 1.857, "epsilonL": 0.0001814, "Eth": 24.22}, "E_min": 24.22, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
24.22	0.0	
28.71	0.0002523	
34.02	0.001253	
40.32	0.003584	
47.79	0.007995	
56.64	0.01514	
67.13	0.02515	
79.57	0.03725	
94.3	0.05004	
111.8	0.06219	
132.5	0.07294	
157.0	0.0821	
186.1	0.08984	
220.5	0.09645	
261.4	0.1022	
309.8	0.1072	
367.2	0.1117	
435.2	0.1157	
515.8	0.1193	
611.3	0.1224	
724.5	0.1251	
858.7	0.1273	
1018.0	0.129	
1206.0	0.1302	
1430.0	0.1308	
1694.0	0.1308	
2008.0	0.1302	
2380.0	0.1289	
2821.0	0.1271	
3343.0	0.1245	
3962.0	0.1214	
4696.0	0.1176	
5566.0	0.1133	
6597.0	0.1086	
7818.0	0.1034	
9266.0	0.09797	
10980.0	0.09228	
13020.0	0.08644	
15430.0	0.08054	
18280.0	0.07467	
21670.0	0.06889	
25680.0	0.06326	
30440.0	0.05784	
36080.0	0.05267	
42760.0	0.04777	
50680.0	0.04317	
60070.0	0.03888	
71190.0	0.03491	
84370.0	0.03125	
-----