{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Fe", "surface_phase": "pc", "species": {"text": "T+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of T+ on Fe(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.3131, "q": 0.1545, "mu": 1.325, "epsilonL": 0.000374, "Eth": 28.97}, "E_min": 28.97, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
28.97	5.926e-24	
34.22	0.0003946	
40.4	0.001275	
47.71	0.002778	
56.34	0.005086	
66.53	0.008347	
78.57	0.01261	
92.78	0.01775	
109.6	0.02348	
129.4	0.02939	
152.8	0.0351	
180.4	0.0403	
213.0	0.04483	
251.6	0.04865	
297.1	0.0518	
350.8	0.05432	
414.3	0.05629	
489.2	0.05779	
577.7	0.05885	
682.2	0.05951	
805.6	0.05981	
951.3	0.05975	
1123.0	0.05936	
1326.0	0.05864	
1566.0	0.05761	
1850.0	0.05628	
2184.0	0.05468	
2579.0	0.05283	
3046.0	0.05075	
3597.0	0.04848	
4247.0	0.04606	
5016.0	0.04353	
5923.0	0.04091	
6994.0	0.03826	
8259.0	0.03559	
9753.0	0.03296	
11520.0	0.03039	
13600.0	0.02789	
16060.0	0.0255	
18970.0	0.02322	
22400.0	0.02107	
26450.0	0.01906	
31230.0	0.01718	
36880.0	0.01544	
43550.0	0.01384	
51430.0	0.01237	
60730.0	0.01104	
71710.0	0.009821	
84680.0	0.008721	
-----