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Plasma-Surface Interaction Data Set 239

Sputtering of V+ on V(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of V+ on V(pc) at 300 K

angle = 0.0 deg E /eV P
25.980.0
30.750.0001864
36.40.0008174
43.070.002212
50.980.004912
60.330.009766
71.40.01804
84.510.03153
100.00.05256
118.40.08378
140.10.1277
165.80.1859
196.20.2583
232.20.3425
274.80.4351
325.30.5319
385.00.6296
455.60.7261
539.20.8207
638.10.9132
755.31.004
893.81.094
1058.01.184
1252.01.273
1482.01.363
1754.01.453
2075.01.543
2456.01.634
2907.01.724
3440.01.813
4072.01.902
4819.01.989
5703.02.074
6750.02.155
7988.02.234
9454.02.307
11190.02.375
13240.02.438
15670.02.493
18550.02.54
21950.02.579
25980.02.607
30750.02.626
36390.02.633
43070.02.628
50970.02.61
60320.02.58
71390.02.537
84490.02.482

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 25.98 – 100000