{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Si", "surface_phase": "pc", "species": {"text": "Xe+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}], "json_data": [{"x1": {"name": "angle", "units": "deg", "value": 0}, "x2": {"name": "E", "units": "eV", "data": {"45.15": {"P": 0}, "52.84": {"P": 8.352e-05}, "61.83": {"P": 0.0003461}, "72.36": {"P": 0.0008979}, "84.68": {"P": 0.001924}, "99.09": {"P": 0.003711}, "116.0": {"P": 0.006689}, "135.7": {"P": 0.01149}, "158.8": {"P": 0.01899}, "185.8": {"P": 0.03036}, "217.5": {"P": 0.04706}, "254.5": {"P": 0.07076}, "297.8": {"P": 0.1031}, "348.5": {"P": 0.1452}, "407.8": {"P": 0.1976}, "477.3": {"P": 0.2598}, "558.5": {"P": 0.3302}, "653.6": {"P": 0.4066}, "764.8": {"P": 0.487}, "895.0": {"P": 0.5696}, "1047.0": {"P": 0.6533}, "1226.0": {"P": 0.7374}, "1434.0": {"P": 0.8218}, "1679.0": {"P": 0.9069}, "1964.0": {"P": 0.9928}, "2299.0": {"P": 1.08}, "2690.0": {"P": 1.169}, "3148.0": {"P": 1.26}, "3684.0": {"P": 1.353}, "4311.0": {"P": 1.447}, "5045.0": {"P": 1.545}, "5903.0": {"P": 1.643}, "6908.0": {"P": 1.744}, "8084.0": {"P": 1.847}, "9461.0": {"P": 1.95}, "11070.0": {"P": 2.054}, "12960.0": {"P": 2.159}, "15160.0": {"P": 2.263}, "17740.0": {"P": 2.366}, "20760.0": {"P": 2.468}, "24300.0": {"P": 2.568}, "28430.0": {"P": 2.665}, "33270.0": {"P": 2.758}, "38940.0": {"P": 2.847}, "45570.0": {"P": 2.931}, "53320.0": {"P": 3.008}, "62400.0": {"P": 3.079}, "73020.0": {"P": 3.142}, "85450.0": {"P": 3.196}}}, "fit": {"fit_function": "SPTEEX", "coeffs": {"lambda": 0.3076, "q": 8.452, "mu": 1.634, "epsilonL": 1.692e-06, "Eth": 45.15}, "E_min": 45.15, "E_max": 100000}}]}