{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Si", "surface_phase": "pc", "species": {"text": "H+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}], "json_data": [{"x1": {"name": "angle", "units": "deg", "value": 0}, "x2": {"name": "E", "units": "eV", "data": {"49.79": {"P": 0}, "58.15": {"P": 0.0002799}, "67.92": {"P": 0.0006721}, "79.32": {"P": 0.001195}, "92.64": {"P": 0.001858}, "108.2": {"P": 0.002655}, "126.4": {"P": 0.003562}, "147.6": {"P": 0.004539}, "172.3": {"P": 0.005531}, "201.3": {"P": 0.006484}, "235.1": {"P": 0.007351}, "274.5": {"P": 0.008098}, "320.6": {"P": 0.008708}, "374.5": {"P": 0.009176}, "437.3": {"P": 0.009506}, "510.8": {"P": 0.009709}, "596.5": {"P": 0.009799}, "696.7": {"P": 0.009788}, "813.7": {"P": 0.00969}, "950.3": {"P": 0.009517}, "1110.0": {"P": 0.009279}, "1296.0": {"P": 0.008988}, "1514.0": {"P": 0.008652}, "1768.0": {"P": 0.008281}, "2065.0": {"P": 0.007882}, "2411.0": {"P": 0.007464}, "2816.0": {"P": 0.007033}, "3289.0": {"P": 0.006595}, "3841.0": {"P": 0.006158}, "4486.0": {"P": 0.005725}, "5240.0": {"P": 0.005302}, "6119.0": {"P": 0.004891}, "7147.0": {"P": 0.004496}, "8347.0": {"P": 0.004119}, "9748.0": {"P": 0.003762}, "11380.0": {"P": 0.003425}, "13300.0": {"P": 0.00311}, "15530.0": {"P": 0.002817}, "18140.0": {"P": 0.002545}, "21180.0": {"P": 0.002294}, "24740.0": {"P": 0.002063}, "28890.0": {"P": 0.001852}, "33740.0": {"P": 0.001659}, "39410.0": {"P": 0.001484}, "46020.0": {"P": 0.001325}, "53750.0": {"P": 0.001181}, "62770.0": {"P": 0.001051}, "73310.0": {"P": 0.0009346}, "85620.0": {"P": 0.0008297}}}, "fit": {"fit_function": "SPTEEX", "coeffs": {"lambda": 0.4819, "q": 0.0276, "mu": 0.9951, "epsilonL": 0.0008597, "Eth": 49.79}, "E_min": 49.79, "E_max": 100000}}]}