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Plasma-Surface Interaction Data Set 160

Sputtering of Li+ on Li(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Li+ on Li(pc) at 300 K

angle = 0.0 deg E /eV P
5.5260.0
6.751.631e-05
8.2468.071e-05
10.070.0002422
12.30.0005936
15.030.001302
18.360.002661
22.420.005159
27.390.009568
33.450.01699
40.860.02872
49.910.04579
60.970.06817
74.470.09405
90.970.1203
111.10.1439
135.70.163
165.80.1773
202.50.1873
247.40.1939
302.10.1976
369.10.199
450.80.1983
550.70.1959
672.60.1919
821.60.1864
1004.00.1795
1226.00.1715
1497.00.1626
1829.00.1528
2234.00.1425
2729.00.1319
3333.00.1212
4072.00.1106
4974.00.1003
6075.00.09037
7421.00.08095
9064.00.07213
11070.00.06394
13520.00.05643
16520.00.04959
20180.00.04341
24650.00.03786
30110.00.03291
36780.00.02853
44920.00.02465
54870.00.02125
67020.00.01828
81870.00.01568

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 5.526 – 100000