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Plasma-Surface Interaction Data Set 159

Sputtering of 4He+ on Li(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of 4He+ on Li(pc) at 300 K

angle = 0.0 deg E /eV P
6.5040.0
7.9180.0002394
9.6390.0007825
11.740.001783
14.290.003498
17.390.006288
21.180.01063
25.780.01706
31.390.02607
38.210.03788
46.520.05216
56.630.06799
68.950.08397
83.940.0987
102.20.1111
124.40.1208
151.50.1276
184.40.1318
224.50.1338
273.30.1338
332.70.1322
405.10.1292
493.10.125
600.40.1199
730.90.114
889.80.1074
1083.00.1004
1319.00.09319
1606.00.08585
1955.00.07855
2380.00.0714
2897.00.06451
3527.00.05795
4294.00.05178
5228.00.04605
6364.00.04076
7748.00.03594
9433.00.03156
11480.00.02761
13980.00.02408
17020.00.02094
20720.00.01816
25230.00.01571
30710.00.01355
37390.00.01167
45520.00.01002
55420.00.008597
67470.00.00736
82140.00.006291

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 6.504 – 100000