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Plasma-Surface Interaction Data Set 156

Sputtering of H+ on Li(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of H+ on Li(pc) at 300 K

angle = 0.0 deg E /eV P
5.650.0
6.8980.0002101
8.4220.0008066
10.280.001992
12.550.00402
15.330.007069
18.720.01108
22.850.01565
27.90.02015
34.060.02404
41.590.02701
50.780.02906
62.00.03028
75.690.03083
92.420.03086
112.80.03046
137.80.02973
168.20.02871
205.40.02747
250.70.02605
306.10.02449
373.80.02284
456.30.02114
557.20.01942
680.30.01772
830.60.01606
1014.00.01447
1238.00.01296
1512.00.01154
1846.00.01023
2253.00.00903
2751.00.007935
3359.00.006947
4101.00.006059
5007.00.005268
6114.00.004567
7464.00.003947
9113.00.003404
11130.00.002928
13590.00.002513
16590.00.002152
20250.00.00184
24730.00.001571
30190.00.001338
36860.00.001139
45000.00.0009674
54940.00.0008209
67080.00.0006957
81900.00.0005889

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 5.65 – 100000