{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "LiD", "surface_phase": "a", "species": {"text": "D", "charge": 0}, "temperature": 300, "comment": "", "refs": [{"id": 3, "authors": "P. Krstic, E. Ostrowski, S. Dwivedi, A. Maan, S. Abe, A. C. Van Duin, B. Koel", "title": "Processes at lithium-hydride/deuteride surfaces upon low energy impact of H/D", "journal": "Frontiers in Physics", "volume": "11", "page_start": "", "page_end": "", "article_number": "", "year": 2023, "note": "", "doi": "10.3389/fphy.2023.1105194", "bibcode": "2023FrP....1105194K", "url": "https://dx.doi.org/10.3389/fphy.2023.1105194"}]}
------------------------------------------------------------------------
Sputtering of D on LiD(a) at 300 K
angle = 0.0 deg
E /eV	P	unc
1.0	0.0	0.0
5.0	0.003	0.0017
10.0	0.0318	0.0056
25.0	0.0428	0.0058
50.0	0.0677	0.0069
75.0	0.0687	0.0071
100.0	0.0717	0.0064
-----

angle = 45.0 deg
E /eV	P	unc
1.0	0.0	0.0
5.0	0.005	0.0022
10.0	0.0299	0.0052
25.0	0.1345	0.0091
50.0	0.266	0.0119
75.0	0.2829	0.0126
100.0	0.257	0.0128
-----

angle = 85.0 deg
E /eV	P	unc
1.0	0.0	0.0
5.0	0.0072	0.0026
10.0	0.032	0.0057
25.0	0.0982	0.0111
50.0	0.1501	0.0156
75.0	0.1533	0.0167
100.0	0.1905	0.0147
-----

Sputtering of D on LiD(a) at 300 K
E = 1.0 eV
angle /deg	P	unc
0.0		0.0	0.0
45.0		0.0	0.0
85.0		0.0	0.0
-----

E = 5.0 eV
angle /deg	P	unc
0.0		0.003	0.0017
45.0		0.005	0.0022
85.0		0.0072	0.0026
-----

E = 10.0 eV
angle /deg	P	unc
0.0		0.0318	0.0056
45.0		0.0299	0.0052
85.0		0.032	0.0057
-----

E = 25.0 eV
angle /deg	P	unc
0.0		0.0428	0.0058
45.0		0.1345	0.0091
85.0		0.0982	0.0111
-----

E = 50.0 eV
angle /deg	P	unc
0.0		0.0677	0.0069
45.0		0.266	0.0119
85.0		0.1501	0.0156
-----

E = 75.0 eV
angle /deg	P	unc
0.0		0.0687	0.0071
45.0		0.2829	0.0126
85.0		0.1533	0.0167
-----

E = 100.0 eV
angle /deg	P	unc
0.0		0.0717	0.0064
45.0		0.257	0.0128
85.0		0.1905	0.0147
-----