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Contact nameGolubeva
Steel typeRusfer
Ion fluxφ /m-2.s-13e+21
Ion fluenceΓ /m-23e+24 – 7e+25
Ion energy per DE /eV100
Sample thicknesst /mm1
Sample temperatureT /K443
Sample temperature measurement locationbackside
Analysis methodmass loss
Sputtering yieldSY0.087 – 0.067
Result NotesStructures grow at a surface up to 250 nm at highest fluence
Remarksplasma, biased
Image filesFig_1_AG.jpg